
“Microsystems by Heterogeneous Integration”
Professor Masayoshi Esashi
Biography
Masayoshi Esashi (born 30 January 1949 in Sendai, Miyagi) is an engineer and a global authority on microelectromechanical systems. He serves as professor of the Tohoku University graduate school of engineering.
He received the B.E. degree in electronic engineering in 1971 and the Doctor of Engineering degree in 1976 at Tohoku University. He served as a research associate from 1976 and an associate professor from 1981 at the Department of Electronic Engineering, Tohoku University. Since 1990 he has been a professor at the World Premier International Research Center Advanced Institute for Materials Research (WPI AIMR). He is now professor and director of the Micro System Integration Center, concurrently at WPI AIMR and at the Center of Innovation in Tohoku University.
He was a director of the Venture Business Laboratory in Tohoku University from 1995 to 1998, a president of the Sensor and Micromachine Society in the Institute of Electrical Engineers in Japan from 2002 to 2003, a president of the Japan Society of Next Generation Sensor Technology from 2010 to 2015, and a chairman of the MEMS Park Consortium in Sendai from 2004.
He served as general cochair of the 4th IEEE Micro Electro Mechanical Workshop in 1991 held in Nara, Japan, as general chair of the 10th International Conference on Solid State Sensors and Actuators (Transducers 99) in 1999 held in Sendai, Japan, and as Technical Programme Chair of IEEE Sensors 2006 held in Daegu, Korea.
Awards
- SSDM Award (2001)
- Purple Ribbon award (2006)
- IEEE Andrew S. Grove Award (2015)
- IEEE Jun ichi Nishizawa Award (2016)
Speech overview
Microsystems, or MEMS, are fabricated using semiconductor technology and applied as value added components for advanced systems. Our activities in MEMS development and commercialisation began 45 years ago. MEMS transferred onto CMOS LSI (heterogeneous integration) have been developed for future advanced systems such as multiband wireless systems, tactile sensor networks for safe nursing robots, massive parallel electron beam lithography systems and others. Cost effective development is required for microsystems because they are versatile and not standardised.
